Electromechanical modelling and stress analysis of RF MEMS capacitive shunt switch
نویسندگان
چکیده
This paper presents the simulation results as well calculated of a proposed RF MEMS shunt switch with Electro-mechanical modelling and stress gradient characteristics. The analysis is done three membrane structures such plane beam, incorporated without perforations, non-uniform meander type these are simulated in COMSOL Multi-physics tool. various model carried out for different values residual gradients structures, materials, beam thickness. characterized that higher not desirable switching action. By analyzing all we have observed meandered obtained maximum 35.6 MPa, center deflection 0.06 MPa/μm, deformations which least among considered switches.
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ژورنال
عنوان ژورنال: Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
سال: 2022
ISSN: ['0946-7076', '1432-1858']
DOI: https://doi.org/10.1007/s00542-022-05367-9